Hamamatsu L12542 VUV ionizer is aN electrostatic charge remover that makes use of VUV (vacuum ultraviolet) light. Due to its wide irradiation angle about 3 times larger than other VUV light source, the L12542 efficiently removes electrostatic charges over large areas in depressurized or vacuum environments. Up until now two or more VUV light sources were needed to neutralize electrostatic charges in large areas due to their limited irradiation angle. The L12542 solves this problem and efficiently neutralizes large areas in a vacuum.


  • Dechucking of electrostatic chucks
  • Semiconductor manufacturing equipment (vacuum process)
  • LCD manufacturing equipment
  • Organic EL manufacturing equipment
  • Hard disk manufacturing equipment
  • Film manufacturing equipment


  • Long life,
  • Large irradiation (neutralizing) area,
  • Highly efficient ion generation in a vacuum,
  • No air flow needed,
  • No overshoot (generates no opposite-polari- ty static charges),
  • No dust and electromagnetic noise emissions.



Parameter Description / Value Unit
Spectral distribution 115 to 400 nm
Window material MgF2
Cooling method Air cooling by cooling fan
Operating temperature range +10 to +40 °C
Storage temperature range 0 to +60 °C
Operating humidity range Below 80 % (no condensation)
Storage humidity range Below 85 % (no condensation)
Warm-up time 25 ± 5 s
Light source service life 2 230 nm 2000 (guaranteed) h
160 nm 500 (expected)
Input voltage (AC) 100 V to 240 V (100 V/200 V auto switching), single phase 50 Hz / 60 Hz
Power consumption (Max.) 90 VA
Current Stock:
HAM L12542
6.00 LBS
Manufacturer's Warranty: The manufacturer warrants its products to be free of detects in materials and workmanship for the stated period from date of original purchase invoice. All warranties or merchant ability and fitness for any purpose and all other warranties, expressed or implied, except those expressly set forth herein, are deemed waived and excluded. Manufacturer's duty under the warranty is limited to replacement and/or repair of the defective part at their exclusive option. Seller shall not be liable for any expenses or damages incurred by the purchaser except as expressly set forth herein, and in no event shall seller or manufacturer be liable for any special, incidental or consequential damages of any kind. This warranty does not supersede any statutory rights that may be available in certain countries. The foregoing manufacturer's warranty of shall be voided, and of no force and effect if buyer has modified or damaged the product.
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